| 학회 |
한국화학공학회 |
| 학술대회 |
2003년 가을 (10/24 ~ 10/25, 한양대학교) |
| 권호 |
9권 2호, p.2680 |
| 발표분야 |
재료 |
| 제목 |
Pattern uniformity control in room-temperature imprint lithography |
| 초록 |
Non-uniformity in patterning that can arise in room-temperature imprint lithography is analyzed and a condition is presented under which the uniformity is assured. The condition is developed in such a way that the elastic recovery of stain-hardened polymer after the mold is removed does not cause the non-uniformity. Experimental testing of the condition reveals that it is a reliable criterion for uniform patterning. |
| 저자 |
홍필순, 이홍희
|
| 소속 |
서울대 |
| 키워드 |
imprint; room-temperature; uniformity; elastic recovery |
| E-Mail |
|
| VOD |
VOD 보기 |
| 원문파일 |
초록 보기 |
