초록 |
Recently, many approaches via soft lithography for large-area and diverse polymeric patterning have been intensively researched and expected. However, most of the polymer patterns from these methods were used for sacrificial templates to fabricate inorganic patterns and its process was confined to photolithography needing vacuum environment. Here, we used a crystalline polymer, poly(e-caprolactone), as a template from capillary force lithography(CFL) and deposited various inorganic precursors, pre-synthesized nanoparticles , organic low molecules and so on. After thermal annealing at above melting point of PCL, liquid PCL flows and simultaneously moves as-deposited materials into PCL trenches in an instant. Because the materials were strongly segregated from PCL, very fine shaped patterns without residual things. Not only this facile technique suggests that various materials can be patterned on any substrate, but shows some applications to electronic and optical devices. |