| 초록 |
TCO materials are important components of photovoltaic (PV) devices, which have the greatest impact on the efficiency of solar cells. In this work, Mg and Ga co-doped ZnO films were prepared on SLG substrate using RF magnetron sputtering system. The effect of variation of substrate temperature on the properties of Mg and Ga co-doped ZnO thin films have been investigated. Substrate Temperature was varied from RT to 500oC in the interval of 50oC. Deposition condition are RF power of 40W and working pressure of 1 mTorr. Since the energy of the particles varies depending on the substrate temperature, the thin film also expects to have different characteristics, and previous study in our lab also showed a remarkable difference. Particularly, electrical characteristics have been shown significant change in the resistivity, with large band gap difference. However, these results have been related to using low quality sputtering target and in the current context, more optimistic and comparatively outstanding results are expected for MGZO material by analyzing using XRD, SEM, UV-vis and Hall-measurement. |
