| 초록 |
Recently, transparent conducting oxides (TCOs) have been attractive in electronic devices such as organic lighting emitting diode (OLED), solar cell, plasma display panels (PDPs). TCOs comprise a class of materials that can be thought as conjugate property materials having both conductivity and transparency. Among these TCOs, 12CaO∙7Al2O3 (C12A7) is a desirable material due to highly transparency and special cage structure. Originally, C12A7 is a typical insulator. However, it’s possible to modify C12A7 electrical properties from insulator to conductor via several treatments. The achievement to obtain C12A7 crystalline thin film plays an important role to modify the electrical properties and can be applied to commercialize in real electronic device industry. In this study, with highly dense C12A7 target, we fabricated the C12A7 thin film by RF magnetron sputtering. The electrical properties of C12A7 film were measured by Hall measurement system. The structure of film was carried out by high resolution X-ray diffracmeter (XRD) and atomic force microscope (AFM), respectively. |
