초록 |
The key characteristics of cobalt nanoparticles, generated by chemical reaction between cobalt chloride and hydrogen in a vapor phase, were predicted by a first principle model. Effects of precursor concentration, hydrogen flow rate and reaction zone temperature on the average particle size were examined. The average particle size increased as the precursor concentration or the reaction zone temperature increased, while decreasing with the increased hydrogen flow rate. Although the magnitude of the predicted particle size somewhat larger than the measured one, the dependence of the particle size on the investigated process conditions agrees well with experimental measurements. |