학회 |
한국재료학회 |
학술대회 |
2020년 가을 (11/18 ~ 11/20, 휘닉스 제주 섭지코지) |
권호 |
26권 1호 |
발표분야 |
G. 나노/박막 재료 분과 |
제목 |
The Mechanical Properties of Nanocomposite Al-Cr-Fe-Ti-N Coatings Fabricated by Magnetron Sputtering Process with Single Composite Target |
초록 |
Recently, with the development of high performance cutting tools and mechanical parts, study of multi-functional materials with high efficiency is becoming important. Al-Cr-N nitride coating with high percentage of aluminum have been used widely in the industry field due to high hardness, high wear resistance, low friction surface and adhesion between tool and working piece. The role of adding third and forth elements have been studied to improve the properties of the Al-Cr-N coating. In this study, novel nanocomposite Al-Cr-Fe-Ti-N coatings were successfully fabricated by magnetron sputtering process with single composite target under Ar+N2 atmosphere. FE-SEM / EDS carried out to determine the uniformity of elemental composition as well as microstructure of the coatings. EDS analysis was conducted for 5 points per specimen to confirm the composition uniformity of each coating. Hardness and elastic modulus of coatings were analyzed by Nano-indentation and adhesion property of coatings were analyzed by Scratch tester. The thickness of coating was confirmed as about 1.5 μm and elemental composition was relatively uniformed. It was confirmed that Al-Cr-Fe-Ti-N coating had the highest hardness of about 3590 Hv. Also showed LC2 value of over 70 N on scratch test which means super adhesion property with the substrate. |
저자 |
김수빈1, 박현준2, 안기원1, 이선영1, 문경일3
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소속 |
1한국생산기술(연), 2한양대, 3인하대 |
키워드 |
Al-Cr-Fe-Ti-N coating; Magnetron sputtering; Single alloy target; High adhesion force; Super hard coating
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E-Mail |
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