학회 | 한국화학공학회 |
학술대회 | 2009년 봄 (04/23 ~ 04/24, 광주 김대중컨벤션센터) |
권호 | 15권 1호, p.225 |
발표분야 | 미립자공학 |
제목 | Holographic Fabrication of HierarchicalMicroparticles Using Microprism Array |
초록 | Microparticles with periodic 3D nanostructures have a variety of uses due to their special photonic properties as well as their morphology. They are also applicable to the biosensors, tissue engineering and diagnostic assay systems due to their highly efficient fluorescent property. In this study, we reported new strategy to produce microparticles with 3D periodic nanostructures from microprism based on holographic lithography. By using the array of microprisms, it is possible to achieve array of hierarchical microstructures with periodic internal structures in merely a single step. Here, coherent laser beam was divided and recombined by the microprisms to generated multi-dimensional interference patterns. Then the interference patterns were transferred to the negative photoresist under proper baking and develop conditions. Finally, microparticles with internal periodic nanostructures were acquired after detaching them from the substrate using sacrificial release layer. Continuous production of microstructured particle is possible by the use of photocurable liquid and proper valve system. |
저자 | 이승곤1, 양승만1, 박효성2 |
소속 | 1한국과학기술원 생명화학공학과 / 광자유체집적소자 창의연구단, 2한국과학기술원 생명화학공학과 / 광자유체집적소자 창의연구단 |
키워드 | Holographic lithography; photonic crystals; microparticle |
원문파일 | 초록 보기 |