| 초록 |
The growth in the use of Nitinol (TiNi) in the medical industries has exploded over the past 10 years.The demand for minimally-invasive procedures has required novel instrumentation and implants to be designed by engineers and physicians. An increasing number of these devices use Nitinol as the critical component. A thin film of elementary nickel was deposited by atomic layer deposition (ALD) on nitinol shape memory alloys for a biomedical application. To prepare Ni thin films on nitinol shape memory alloy, the deposition cycle for Ni ALD consisted of two sequential chemical reaction steps: an oxidizing step and a reducing step. An atomic nickel oxide layer was made by using bis(cyclopentadienyl)-nickel and water; then nickel oxide layer was reduced to Ni metal by exposure to hydrogen plasma. |
