| 초록 |
Lithium phosphorous oxy-nitride (LiPON) thin film electrolytes have drawn much interest in solid state thin film batteries due to its moderate Li-ion conductivity (~ 10-6 S/cm) and stability upon contact with Li anode. Li-sulfide and Li-oxide electrolytes have higher Li-ion conductivity (10-3 ~ 10-4 S/cm) and thus, recently, there are many efforts to use them in solid state batteries. But, both electrolytes are known to be easily decomposed around the potential of 5 V and very chemically unstable in contact with a Li metal anode. One of the common problems encountered in the development of LiPON thin film electrolytes is the relatively low deposition yield and crack formation on the cathode. In this study, LiPON thin films were deposited by MOCVD technique, and parametric investigation was conducted to enhance the growth rate of LiPON thin films by varying the deposition conditions. Organometallic precursor for LiPON films were Li(C11H19O2), (Li(DPM)) and PO(C2H5O)3 (TEP). N2 was used as a carrier gas and NH3 was the nitridation gas. |
