| 학회 |
한국고분자학회 |
| 학술대회 |
2011년 봄 (04/07 ~ 04/08, 대전컨벤션센터) |
| 권호 |
36권 1호 |
| 발표분야 |
고분자 합성 |
| 제목 |
Synthesis of High-k Materials with Organic-Inorganic Framework by UV curing and E-beam radiation |
| 초록 |
Novel high-k thin films with excellent dielectric properties were synthesized using non-hydrolytic sol-gel reaction. A facile sol-gel method was used to produce crack-free composite films with no remaining traces of solvents. Sol-gel reaction was performed at 80°C and followed by thermal condensation and elimination of methanol as a byproduct. In order to prepare the matrix of organic-inorganic compounds, an organic compound of 4,4'-(hexafluoroisopropyldene)diphenol(FBPA) containing hydroxyl moieties at both ends was reacted with an inorganic precursor, 3-(trimethoxysilyl)propylmathacrylate(ATMS). The E-beam synthesis of the unreacted C=C bonds was performed using 2,2-dimethoxy-2-phenyl-acetophenone as an initiator. Since the matrix consists of both silane and halogenated bisphenol-A moieties with high electronic polarizability, adjusting the chemical composition allowed tailoring of the dielectric, film and mechanical properties of the final composite materials. |
| 저자 |
조병건, 전공주, 노승주, 석민균, 김성은, 권용구
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| 소속 |
인하대 |
| 키워드 |
sol-gel; high-k; hybrid
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| E-Mail |
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