| 학회 | 한국고분자학회 |
| 학술대회 | 2011년 봄 (04/07 ~ 04/08, 대전컨벤션센터) |
| 권호 | 36권 1호 |
| 발표분야 | 기능성 고분자 |
| 제목 | Effect of oxygen flow rate on water vapor barrier properties of ZnO coating deposited on PEN film by PECVD |
| 초록 | The effects of oxygen flow rates on ZnO coatings at a fixed RF power were studied on polyethylene naphthalate film by using plasma enhanced chemical vapor deposition. The thickness of ZnO coating was decreased with increasing oxygen flow rate. Water vapor transmission rates (WVTRs) of single ZnO coating was 6.0 g/m2/day. However, WVTR of SiOx/ZnO/SiOx decreased to 1x10-3 g/m2/day at a coating thickness of 1m. |
| 저자 | 송준용, 김주호, 김성룡 |
| 소속 | 충주대 |
| 키워드 | ZnO; PECVD; WVTR |
