| 학회 |
한국공업화학회 |
| 학술대회 |
2009년 봄 (04/15 ~ 04/17, 호텔인터불고(대구)) |
| 권호 |
13권 1호 |
| 발표분야 |
무기재료 |
| 제목 |
Coating of TiO2 thin films on glass and polyethylene particles by rotating inductively coupled plasma reactor |
| 초록 |
Particles coated with TiO2 thin films can be applied for H2 production and for pollutant decomposition.There are several types of reactor for dry particle coating, such as chemical vapor deposition reactor, spray pyrolysis reactor, fluidized bed reactor, etc.The plasma chemical vapor deposition process has been widely used for preparation of high quality thin films and can also be used to coat the uniform thin films on particles.In this study, we coated the TiO2 thin films on particles using the rotating inductively coupled plasma reactor and investigated the characteristics of the thin films for various process conditions. |
| 저자 |
김동주, Pham Hung Cuong, 김교선
|
| 소속 |
강원대 |
| 키워드 |
Particle coating; PCVD process; Rotating cylindrical plasma reactor; TiO2 thin film
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| E-Mail |
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