| 학회 |
한국재료학회 |
| 학술대회 |
2008년 가을 (11/07 ~ 11/07, 차세대융합기술연구원) |
| 권호 |
14권 2호 |
| 발표분야 |
전자재료 |
| 제목 |
Growth of Double- or Triple-Walled Carbon Nanotube Arrays via Block Copolymer Lithography |
| 초록 |
We demonstrate a highly efficient and size selective growth of nitrogen doped CNTs combining a plasma-enhanced CVD (PECVD) process with block copolymer lithography. Self-assembled block copolymer templates provided hexagonal nanoporous PS templates and tilted evaporation of iron over the nanoporous template and thermal treatment generated a hexagonal array of catalyst particles with a sub-nanometer scale tunability of their size. Nitrogen-doped CNT array was grown from the nanopatterned catalysts by a PECVD under an ammonia environment and a supergrowth CNT arrays was successfully grown by the investigation of various growth conditions. Our scalable process complemented by sub-nanometer scale engineering of catalyst particles attained a highly selective growth of double-walled and triple-walled nanotubes. |
| 저자 |
이덕현, 김상욱, 이원종
|
| 소속 |
KAIST |
| 키워드 |
Carbon nanotubes; Block copolymers; PECVD
|
| E-Mail |
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