| 학회 |
한국공업화학회 |
| 학술대회 |
2020년 가을 (10/28 ~ 10/30, 광주 김대중컨벤션센터(Kimdaejung Convention Center)) |
| 권호 |
24권 1호 |
| 발표분야 |
포스터-콜로이드·계면화학 |
| 제목 |
Organic film thickness measurement using X-ray interaction |
| 초록 |
X-ray is widely used as non-destructive test. X-ray is generated from the energy loss by electron deceleration and collision with matter. It is usually generated in a vacuum tube with high voltage. This research focuses on thickness measurement of organic thin film using X-ray interaction. A silicon drift detector was used to detect the signals and signals were separated into X-ray fluorescence and Compton scattering signals. Correlation between X-ray signals along the film thickness was analyzed. X-ray fluorescence has linear dependency in the lower range, and Compton scattering signal has linear dependency with both higher and lower range. However, the sensitivity of X-ray fluorescence is significantly higher than the value of Compton scattering, in lower range. Moving film was also tested to validate this technique and the result is compatible with fixed film. Finally, this technique was able to detect the changes in the thickness in moving film for industrial application. |
| 저자 |
박정환1, 최용석1, 김준혁1, 이정묵1, 김태준1, 윤영상2, 임상호1, 김종윤1
|
| 소속 |
1한국원자력(연), 2영남대 |
| 키워드 |
X-ray; Radiochemistry; Organic film
|
| E-Mail |
|
