| 학회 |
한국고분자학회 |
| 학술대회 |
2006년 봄 (04/06 ~ 04/07, 일산킨텍스) |
| 권호 |
31권 1호 |
| 발표분야 |
기능성 고분자 |
| 제목 |
The Effect of the Chemical Reactivity of Porogen on Mechanical Properties and Pore Morphologies of Nanoporous Organosilicate Glass. |
| 초록 |
We synthesized chemically reactive trimethoxysilyl-β-cyclodextrin (TMSCD) and trimethoxysilyl glucose (TMSGC), which could react with a matrix which is the copolymer of methyl trimethoxysilane (MTMS) with 25 mol% of bis-1,2-triethoxysilyl ethane (BTESE). And their mechanical properties and dielectric constants were compared. The pore size and distribution were confirmed by synchrotron T-SAXS. And nano indentation was employed to measure elastic modulus and surface hardness. Synchrotron T-SAXS experiment showed that the pore size for TMSCD and TMSGC were almost identical to the molecular size of each precursor. Both reactive porogens resulted in much higher mechanical strength even at high porogen loading of 40% due to uniform nanoporous. And the smaller pores were obtained by using TMSGC (0.65 nm) than TMSCD (1.70 nm) because of small sized glucose precursor. At same dielectric constant (k ＜ 2.3), TMSGC resulted in high mechanical strength of 8.8 GPa, but TMSCD obtained 8.0 GPa. |
| 저자 |
이희우1, 이태훈1, 민성규2, 김현정1, 윤도영3, 문봉진1
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| 소속 |
1서강대, 2하이닉스 반도체, 3서울대 |
| 키워드 |
ultra-low dielectric materials; nanoporous; reactive porogen
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| E-Mail |
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