화학공학소재연구정보센터
학회 한국화학공학회
학술대회 1999년 봄 (04/23 ~ 04/24, 성균관대학교)
권호 5권 1호, p.1689
발표분야 재료
제목 ’Wet Colloid 방법’을 이용한 투명한 SiC 박막의 제조
초록 A new method in preparing thin SiC films on a polyethylene glycol (PEG)
self-assembled silicon substrate is described.The stable colloidal dispersion of nano-sized (30 nm of average particle size)β-SiC aqueous solution was used as a starting material.By simply adding sodium dodecylsulfate (SDS) onto the solution containingPEG self-assembled silicon substrate at room temperature and pH 3, dense andthin SiC films can be formed on the substrate through a controlled coagulation ofcolloidal SiC. The resulting SiC films are transparent with 4μm thickness.
저자 조규진, 문일식
소속 순천대
키워드 transparent SiC thin films; wet colloid method; self-assembled
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