| 학회 |
한국재료학회 |
| 학술대회 |
2005년 가을 (11/10 ~ 11/11, 한양대학교) |
| 권호 |
11권 2호 |
| 발표분야 |
에너지환경재료 |
| 제목 |
RF 마그네트론 스퍼터링법에 의한 태양전지용 ZnO:Al 투명전도막 증착시 수소 분위기에서의 texturing 효과 |
| 초록 |
ZnO:Al thin film has become attractive as a transparent and conducting electrode for thin-film solar cell. Solar cell electrode should have textured surface structure in order to capture photons reflected from inner cell. For texturing ZnO:Al surface, we have grown ZnO:Al by RF magnetron sputter in H2/Ar (5% H2) atmosphere with increasing substrate temperature. At 150 ℃ the resistivity was 5.95 × 10-4 and the surface roughness was increased to 111.83 Å that is sufficient to solar cell front electrode. The average transmittance in wavelength region of 200~500 nm was over 93% |
| 저자 |
백상열1, 손창식2, 허재성1, 이정섭1, 이병훈1, 최인훈1
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| 소속 |
1고려대, 2신라대 |
| 키워드 |
transparent conductive oxide; textured; hydrogen atmosphere
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| E-Mail |
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