| 학회 |
한국공업화학회 |
| 학술대회 |
2007년 봄 (05/11 ~ 05/12, 계명대학교) |
| 권호 |
11권 1호 |
| 발표분야 |
무기재료 |
| 제목 |
새로운 친수성 물질의 3차원 나노 구조물의 제조와 응용 |
| 초록 |
We fabricated novel hydrophilic micro/nano structures on Si substrates using a patented hydrophilic hybrid polymer with excellent processability by soft lithography methods such as the imprinting lithographic technique and micro transfer molding (μTM). Novel hydrophilic micro/nano structures were fabricated on Si substrates using the hydrophilic hybrid polymer with excellent processability by soft lithography methods, even on the sub-micron level. The PDMS mold was not possible to reproduce due to high viscosity, but the hydrophilic material pattern was reproduced accurately because of its low viscosity and low surface tension. So we successfully fabricated micro/nano inorganic replica structures using novel hydrophilic molds. |
| 저자 |
홍난영, 이동훈, 김동표
|
| 소속 |
충남대 |
| 키워드 |
Hydrophilic; Nano Mold; micro transfer molding
|
| E-Mail |
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