| 학회 |
한국고분자학회 |
| 학술대회 |
2003년 가을 (10/10 ~ 10/11, 부경대학교) |
| 권호 |
28권 2호, p.219 |
| 발표분야 |
고분자 구조 및 물성 |
| 제목 |
Effect of Chemical Structure of Porogens on Miscibility with a PMSSQ Copolymer |
| 초록 |
Star-shaped poly (ε-caprolactone), PCL has been extensively used as pore generating material, porogen, because of their unique properties such as suitable thermal property and good miscibility with matrix material. These star-shaped PCL’s with two different core structure can be also used as molecular templates in poly (methylsilsesquioxane), PMSSQ, based copolymer matrices to fabricate nanoporous organosilicate thin films for low dielectric constant (low-k) applications. In present study, we investigated the physical interaction between porogen and matrix, and porosity of the nanoporous thin films by FT-IR, FE-SEM and X-ray porosimetry. When compared to that of the thin film prepared with aromatic core porogens, refractive index (or dielectric constant) of nanoporous thin films prepared with aliphatic core porogens considerably decreases due to miscibility difference. It was found that from FT-IR spectra, thin films with optimized nanoporous structure and enhanced properties showed stronger hydrogen bonding interaction between porogen and matrix. |
| 저자 |
최연승1, 이진규1, 윤도영1, 김상율2, 진문영3, 이창진3, 차국헌1
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| 소속 |
1서울대, 2한국과학기술원 화학과, 3한국화학(연) |
| 키워드 |
low-k; nanoporous thin film; X-ray porosimetry
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| E-Mail |
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