초록 |
Until now, indium tin oxide (ITO) films grown by batch type direct current (DC) or radio frequency (RF) sputtering have been widely used as the anode layer in a organic solar cell. However, batch type sputtering process for deposition of the transparent electrode cannot be employed for mass production of the organic solar cells. In addition, it is necessary to develop low temperature grown TCO electrode with low resistance, high work function, and high transmittance as well as superior flexibility for high performance and low cost flexible organic solar cells. In thiis work, we reports on the preparation and characteristics of new transparent conducting oxide electrodes grown by using specially designed roll-to-roll (R2R) sputtering system and linear facing target sputtering system for use in organic solar cells. In particular, electrical, optical and structural properties of IZO, IZO/Ag/IZO, GZO, GZO/Ag/GZO, AZO, and IZTO were compared to substitute a conventional ITO electrode. |