| 초록 |
Microstructures of iso-butylsilsesquioxane copolymers containing 1,2-bis(trimethoxysilyl)ethane (BTMSE), which has an ethylene bridging group, or methyltrimethoxysilane(MTMS) as comonomers were investigated, and compared with those of the respective homopolymers. The iso-butyl homopolymer initially showed rough surfaces upon spin-coating and exhibited a significant weight loss upon heating to 250℃. As the BTMSE or MTMS comonomer units are incorporated, the tendency to form cage-like structures decreased substantially. Moreover, the weight loss upon heating to 430℃ was rather small. Therefore, the reduction is the cage structure is essential to forming good-quality thermally stable films. |
