| 학회 |
한국재료학회 |
| 학술대회 |
2011년 봄 (05/26 ~ 05/27, 제주 휘닉스 아일랜드) |
| 권호 |
17권 1호 |
| 발표분야 |
A. Information and Sensor Materials(정보소재 및 센서) |
| 제목 |
High Sensitivity and Low Power Consumption CO Micro Gas Sensor based on Nano-powders and Micro-heater |
| 초록 |
CO micro gas sensor was fabricated based on micro-heater using tin oxide nano-powder for effective gas detection and monitoring system with low power consumption and high sensitivity. Tin oxide based nano-powders were fabricated using conventional method and their structural properties were examined by the SEM, XRD, etc. Membrane type micro-heater based on Si substrate was fabricated by using CMOS compatible MEMS process by using bulk micromachining. The gas sensing properties for slurry-dropped tin oxide thick film device were measured for CO gas. Micro gas sensors showed high sensitivity and low power consumption, with about 15 mw power consumption, 2 ppm CO could be detected. |
| 저자 |
문승언, 이재우, 최낙진, 이형근, 양우석, 김종대
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| 소속 |
한국전자통신(연) |
| 키워드 |
Micro gas sensor; Nano-powder; Micro-heater
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| E-Mail |
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