화학공학소재연구정보센터
학회 한국화학공학회
학술대회 2010년 가을 (10/21 ~ 10/22, 대전컨벤션센터)
권호 16권 2호, p.1996
발표분야 재료
제목 Synthesis of Carbon Nanotubes(CNTs) on SiO2/Siby Thermal Chemical Vapor Deposition
초록 We investigated the optimal growth conditions of CNTs on SiO2/p-Si wafer by thermal chemical vapor deposition. Pd nanoparticles were used as catalyst and uniformly distributed on the SiO2/p-Si surface that provides many nucleation sites for the growth of CNTs at 1000℃. Systematic optimization of parameter was carried out for CNTs, growth. For characterization used are Atomic force microscopy, Field emission scanning electron microscopy, Transmission electron microscopy and Raman spectroscopy. The Raman spectroscopy has been performed for CNTs and showed D, G and the sharp G’ peak for CNTs.
저자 최철민, SHARMA RAHUL, 한윤봉, SHARMA RAHUL
소속 전북대
키워드 Palladium(Pd) nanoparticles; Carbno Nanotubes(CNTs); Raman Spectroscopy;
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