| 초록 |
The present papers describes a novel class of polymers containing 7,7-dimethyloxepan-2-one acid labile group. The 7,7-dimethyloxepan-2-one group of the matrix polymer was readily cleaved and the carboxylic acid functionality was formed by acid-catalyzed ring-opening reaction in the exposure region after post-exposure bake. The 7,7-dimethyloxepan-2-one group is synthesized from camphor by Bayer-Villiger oxidation. Sub-0.5 μm line and space pattern were obtained at a dose of 10 mJ/cm2 with a conventional developer using an DUV exposure tool. |
