학회 |
한국화학공학회 |
학술대회 |
2010년 봄 (04/22 ~ 04/23, 대구 EXCO) |
권호 |
16권 1호, p.259 |
발표분야 |
미립자공학 |
제목 |
Preparation ofTiO2 thinfilmsby using aerosol flame depositon process |
초록 |
The aerosol flame deposition (AFD) process is capable of preparing nano-sized metal oxide films from liquid precursors. In our study, We prepared titania thin films with the titanium tetra-isopropoxide (TTIP) precursor by using AFD process. The flame torch was moved zig-zag in an x and y directions for uniform deposition of the thin films. TTIP was carried into the central tube of the torch by flowing N2 gas, and TiO2 was formed by oxy-methane flame and deposited on a substrate placed in a cooler holder. |
저자 |
Ding Jinrui, 김동주, 김교선
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소속 |
강원대 |
키워드 |
TiO2 thin films; aerosol flame reactor
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E-Mail |
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원문파일 |
초록 보기 |