화학공학소재연구정보센터
학회 한국화학공학회
학술대회 2010년 봄 (04/22 ~ 04/23, 대구 EXCO)
권호 16권 1호, p.259
발표분야 미립자공학
제목 Preparation ofTiO2 thinfilmsby using aerosol flame depositon process
초록 The aerosol flame deposition (AFD) process is capable of preparing nano-sized metal oxide films from liquid precursors. In our study, We prepared titania thin films with the titanium tetra-isopropoxide (TTIP) precursor by using AFD process. The flame torch was moved zig-zag in an x and y directions for uniform deposition of the thin films. TTIP was carried into the central tube of the torch by flowing N2 gas, and TiO2 was formed by oxy-methane flame and deposited on a substrate placed in a cooler holder.
저자 Ding Jinrui, 김동주, 김교선
소속 강원대
키워드 TiO2 thin films; aerosol flame reactor
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