| 학회 |
한국고분자학회 |
| 학술대회 |
2012년 가을 (10/11 ~ 10/12, 창원컨벤션센터) |
| 권호 |
37권 2호 |
| 발표분야 |
기능성 고분자 |
| 제목 |
Controlling the Block Copolymer Lamella Patterns via Combining Graphoepitaxy and Surface Guidance |
| 초록 |
Using directed assembly of block copolymer on the pre-patterned surfaces guarantee uniform array or controlled non-regular array. In this system, the chemically patterned surface can induce well resisted array over arbitrary large areas. However, this method requires expensive and complicated e-beam lithography. Alternatively, another method is the graphoepitaxy. In this case, the self-assembly of block copolymer is guided by the topographical wall of lithographically pre-patterned substrates. But, it has limitation on the pitch size of wall to obtain the highly ordered patterns. In this work, we demonstrate a new type of fabrication method to achieve highly controlled and uniform block copolymer patterns. Our approach is to combine the graphoepitaxy and hexagonally surface guiding patterns from crosslinkable block copolymers. When the lamellar forming block copolymers were prepared on hexagonal patterns, aligned stripe was obtained and the alignment was significantly improved. |
| 저자 |
정현중1, 이수미2, 곽은애2, Frank Leibfarth3, Craig Hwaker3, 허준4, 류두열4, 방준하1
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| 소속 |
1고려대, 2삼성전자, 3UCSB, 4연세대 |
| 키워드 |
Block copolymer; Multi-layer; Graphoepitaxy
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| E-Mail |
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