| 학회 |
한국고분자학회 |
| 학술대회 |
2007년 봄 (04/12 ~ 04/13, 제주 ICC) |
| 권호 |
32권 1호 |
| 발표분야 |
블록공중합체를 이용한 신기능 나노물질 개발 및 분석 |
| 제목 |
Nonvolatile charge trap memory devices using ordered arrays of cobalt nanocrystals from diblock copolymer micelles |
| 초록 |
In this work, we present self-assembled diblock copolymer micelles can be used as a template to assemble cobalt (Co) nanocrystal (NC) arrays for charge storage layers in charge trap flash memory devices. Co-embedded diblock copolymer micelles were synthesized on the p-Si substrates having thin tunneling oxide of HfO2. Micelle templates were successfully removed by oxygen plasma treatment, resulting in Co oxide NC arrays. It is demonstrated that Co oxide NCs were reduced to metallic Co by the hydrogen annealing, confirmed with a chemical shift of the Co 2p3/2 peak by XPS analysis. We employed high-k dielectrics (HfO2 for both tunneling and blocking oxides) and high-work function metal gate (Pt) to engineer band-structures of memory devices. Nonvolatile memory devices exhibit programmable nonvolatile memory characteristics that depend on the reduction nature of the Co NCs and thickness of dielectric layers. |
| 저자 |
이장식1, 이재갑1, 손병혁2
|
| 소속 |
1국민대, 2서울대 |
| 키워드 |
nonvolatile memory; diblock copolyer micelle; nanocrystal; memory window
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| E-Mail |
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