| 초록 |
One of the ways to control the physical properties of polymers is to evenly disperse the nanoparticles in the elastomer. Particularly, inorganic nanoparticles such as TiO2, Al2O3 and BaTiO3 can enhance the traits that are difficult to manifest as inherent characteristics of organic polymers like PDMS or PU. On the other hand, it has been reported that the electrostatic force for electrostatic chuck (ESC) improves when a material having a high dielectric constant is used. However, when the content of the nanoparticles increases, the aggregation between the nanoparticles also increases due to the Van der Waals force. In order to prevent this phenomenon, the dispersion method with planetary mixer and 3-roll mill which minimizes the aggregation of nanoparticles was introduced and the dispersion improvement was measured by SEM image. Furthermore, PU was synthesized by controlling hard and soft segment to optimized dielectric constant. |
