| 학회 |
한국고분자학회 |
| 학술대회 |
2007년 가을 (10/11 ~ 10/12, 일산킨텍스) |
| 권호 |
32권 2호 |
| 발표분야 |
분자전자 소재 및 소자 기술(분자전자 부문위원회) |
| 제목 |
Dielectric Properties of Photosensitive Polymeric Insulator for TFT-LCD |
| 초록 |
Recently, a vacuum deposition process has been replaced to spin-on process for reduce manufacturing cost and fabrication step especially TFT-LCD production. For this purpose, we have developed a new spin-on type polymeric insulator and investigated the dielectric property for TFT-LCD. In order to obtain dielectric characteristics, we fabricated MIM and MIS structure by using the insulator. Moreover, the insulator exhibit photo-pattering property in a diluted TMAH solution. As a result, we have achieved excellent leakage current property and lower dielectric constant. |
| 저자 |
최승렬1, 임경진2, 김준영2
|
| 소속 |
1(주)삼양사 중앙(연), 2삼양사 중앙(연) |
| 키워드 |
Organic Insulator; Dielectrics; Photosensitive polymer
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| E-Mail |
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