초록 |
Silicon nanowire biosensor system has been developed due to its inherent high sensitivity. In this study, 100nm silicon nanowire field-effect transistors(FET) device was fabricated by electron-beam lithography and Matrix metalloproteinases-2 (MMP-2) was successfully detected. MMP-2 are proteolytic enzymes that play an significant role in tissue and are related with benign prostatic hyperplasia and prostate cancer. Therefore, there is a need to develop higher sensitive sensors to measure MMP-2 rapidly and precisely. As a result, MMP-2 was successfully detected by conductance versus time characteristics within a few seconds in a range of 1pM to 100nM. Acknowledgments: This research was supported by No.2011-0002102, No. 2012-0006592,and Development of Sustainable Remediation Technology for Marine Contaminated Sediments funded by the Ministry of Land, Transport and Maritime Affairs, Korea. |