| 학회 |
한국화학공학회 |
| 학술대회 |
2010년 가을 (10/21 ~ 10/22, 대전컨벤션센터) |
| 권호 |
16권 2호, p.2050 |
| 발표분야 |
재료 |
| 제목 |
Photonic Crystal Microparticles Fabricated by Interference Lithography for Surface-Enhanced Raman Scattering |
| 초록 |
We report the novel method for fabricating surface-enhanced Raman scattering (SERS) particle based on silver nanoparticles (NPs) decorated photonic crystal microparticles with internal woodpile structures by combining the hot-embossing process and prism holographic lithography (HL). First, microarrays of disk shape are obtained by hot-embossing process using PDMS elastomeric mold. Prism HL induces internal woodpile structure with various reflectance peak positions by controlling exposure time during the process. Finally, we can obtain free-floating photonic crystal microparticles after removing residual layer of microarrays and releasing from the substrates by reactive ion etching and pre-coated sacrificial layer respectively. And silver NPs are decorated on these free-floating HL microparticles by electro-less deposition. The resulting microparticles exhibit highly enhanced sensitivity of SERS because of the 3D porous structure. |
| 저자 |
전환철, 한슬기, 박성규, 양승만
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| 소속 |
KAIST 생명화학공학과 / 광자유체집적소자연구단 |
| 키워드 |
Interference Lithography; SERS; Microparticle
|
| E-Mail |
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| 원문파일 |
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