| 학회 |
한국고분자학회 |
| 학술대회 |
2009년 가을 (10/08 ~ 10/09, 광주과학기술원 오룡관) |
| 권호 |
34권 2호 |
| 발표분야 |
기능성 고분자 |
| 제목 |
Fabrication of two-dimentional micropatterns using liquid crystal defects (TFCDs) array as microlens photomask |
| 초록 |
In this paper, first using toric focal conic domain (TFCD) micro arrays of smectic liquid crystals (LCs), we developed a photomask that combines two imaging elements (microlens arrays and clear windows) in one structure. The periodic TFCD micro-array is prepared by controlling surface anchoring of the smectic liquid crystals. We demonstrate their application as photomasks; that is, by using the simply adjusting (i) the illumination dose, (ii) the size of TFCD array mask, and (iii) the tone of photoresist. In the microlens lithography process, the projected light passes through the photomask, and then is focused by the microlens array to transfer into multilevel microstructures in the photoresist on a planar substrate. We are able to create a variety of different microscale patterns with controlled sizes, geometries, and symmetries that originate from the lenses, clear windows, or their combination. |
| 저자 |
김윤호1, 윤동기2, 정현수1, 김정현1, 윤은경1, 정희태1
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| 소속 |
1KAIST, 2Univ. of Colorado |
| 키워드 |
Photolithography; Smectic Liquid Crystal; Microlens; Micropattern
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| E-Mail |
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