| 초록 |
SF6 has been widely used in the semiconductor industry as a resource for an etchant. However, its high global warming potential attracted the worldwide attention due to the concerns on the drastic climate change. The membrane-based separation technique can be promising to mitigate the emission of greenhouse gas. However, the pure polymeric membranes are known to suffer from the trade-off between permeability and selectivity. In order to overcome its inherent drawback, mixed matrix membranes (MMMs) consisting of highly selective molecular sieves and polymer matrix are being actively investigated. In this work, the permeation properties of pure polymeric membranes using single gases such as O2, N2, and SF6 were compared to those for a different concentration of ZIF-8 particles-containing MMMs. The effect of annealing on the transport properties will be discussed in detail. Also, the effect of polymeric matrix on the effective pore size of ZIF-8 particles will be discussed as well. |
