| 학회 | 한국재료학회 |
| 학술대회 | 2016년 봄 (05/18 ~ 05/20, 여수 디오션리조트 ) |
| 권호 | 22권 1호 |
| 발표분야 | A. 전자/반도체 재료 분과 |
| 제목 | Dielectric Characteristics of PZT Films Fabricated by Aerosol-Deposition Method |
| 초록 | PZT [Pb(Zr0.52Ti0.48)O3] thick films of with a thickness of 5-10㎛ at morphotropic phase boundary, were fabricated on Si wafer using an aerosol deposition method. The films deposited by AD method revealed nano-sized grain and dense structure. The crystallinity AD PZT thick films was enhanced by annealing at 450, 550 and 650℃ for 2h. Though PZT films were made with mixed ceramic powders, PZT films have perovskite structure, as shown in XRD (X-ray diffraction). Annealing process promoted the reaction between mixed powders and crystallinity was also changed. The polarization - electric field (P-E) hysteresis loops from the AD films with mixed phases showed ferroelectic behavior. |
| 저자 | 박춘길1, 정대용1, 임지호1, 이정근1, 고주환1, 류정호2, 최종진2, 한병동2 |
| 소속 | 1인하대, 2재료(연) |
| 키워드 | <P>PZT. aerosol deposition.</P> |
