화학공학소재연구정보센터
학회 한국공업화학회
학술대회 2008년 가을 (11/12 ~ 11/14, ICC 제주)
권호 12권 2호
발표분야 고분자
제목 A Novel Negative Photoinitiator-free Photosensitive Polyimide with a Low Dielectric Constant
초록 This article describes the preparation of a kind of photoinitiator-free photosensitive polyimide(PSPI) that decreased in the dielectric constant . A soluble aromatic polyimide was acrylated via a reaction with acryloyl chlroride in the presence of triethyl amine to produce a new starting material for the modification of aromatic polyimides. photosensitive properties study revealed its good photolithographic properties.
저자 전지희, 최준석, 최봉구, 한학수
소속 연세대
키워드 photosensitive polyimide; photoiniator-free; dielectric constant; lithography;
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