| 초록 |
The investigation of metal oxide semiconductor (MOS) gas sensors is yet of a great applicability in the scientific and industrial community due to their cost effectiveness, efficiency, compatibility due to their cost effectiveness, efficiency, compatibility and portability. Recently, the sensors based on 1D semiconductor nanostructure materials have been widely studied and showed higher sensitivity, faster response and/or enhanced capability to detect low concentration gases compared with thin film materials. The typical nanostructured metal oxides materials, which have been used for gas sensing applications are TiO2, SnO2, ZnO, CuO, WO3, and CdO. In this study, we grow TiO2, CuO, and ZnO nanowires array by hydrothermal method. Before the growth of metal oxide nanowire, the seed layer is deposited by RF sputtering and they are fully grown by hydrothermal method. To making a array, we use photolithography method to prevent contamination. TiO2 nanowire is grown first, because of low pH growth environment(under pH 1). CuO nanowires and ZnO nanowires are grown gradually. Silver(Ag) and Palladium(Pd) is used as catalyst for enhancing sensor properties. Silver and Palladium are deposited by E-beam evaporator. In this study, we detect low concentration of H2, CO, and NOx gases. |
