| 초록 |
Electrodeposited CoW thin film has been studied because of their potential applications in microelectromechanical systems (MEMS), electronic devices (e.g., spintronics, magnetic storages, optical recording devices, and integrated sensors), and several other industries (e.g., automotive, manufacturing, and chemical process). Nanocrystalline CoW thin films were electrodeposited from citrate baths to investigate residual stress, microstructure and surface morphology of the thin films, with varying W concentration in plating baths, solution pH and current density. Nanocrystalline CoW thin films show tensile stress mode. The rest of detailed test results will be further discussed. |
