| 학회 | 한국재료학회 |
| 학술대회 | 2016년 가을 (11/16 ~ 11/18, 경주 현대호텔) |
| 권호 | 22권 2호 |
| 발표분야 | A. 전자/반도체 재료 분과 |
| 제목 | Development flexible and ultra-thin substrates using floating process with water soluble polymer |
| 초록 | Flexible and imperceptible electronic devices have received a lot of attention and have been proposed as the form of chip lens, smart watch, etc. The substrates used for these devices must be flexible and ultrathin, respectively, based on polymer materials. The polymers such as polyamide, polyethylene terephthalate, parylene, etc, are acknowledged as the most suitable as substrates due to thickness controllability, insulating property, compatibility with human skin, durability and processibility, and chemical resistance. In particular, imperceptible devices require the use of the ultrathin and transparent polymer substrates. However, the polymer substrates are easier to be deformed at high temperature at near glass transition temperature and handing is very difficult for the device fabrication process. In order to overcome these obstacles, it is necessary to use rigid substrates when fabrication electronic devices, and thus several approaches using rigid substrates have been suggested as follows: 1) elastomeric stamp process; 2) spalling process; 3) process using chemically removable rigid substrates. Considering the requirement of imperceptible devices, such as reproducibility, uniformity, and cracking in the process separating from rigid substrates, the last one is thought to be most suitable. In this study, we introduce floating process using dissoluble sacrificial layers to make flexible substrates, after the device fabrication. The poly vinyl alcohol (PVA) is used as a sacrificial layer because of it outstanding water-soluble. Flexible substrates are parylene with superb properties such as high heat resistance, high chemical resistance, and transparency, etc. The parylene is deposited on the PVA/rigid substrate by chemical vapor deposition (CVD). Also, we thermal-treat these polymer coated samples at temperatures used for the fabrication of TFT devices, and these samples are dipped in water. Finally, the flexible substrates separeted from rigid substrates are floated on water. |
| 저자 | Kyung Su Kim, Won Jun Kang, Cheol Hyoun Ahn, Hyung Koun Cho |
| 소속 | 성균관대 |
| 키워드 | imperceptible; PVA; parylene; flexible |
