| 초록 |
Compared to conventional photolithography, unconventional lithographic techniques have drawn attention for cost effective, reliable process. However, these techniques are limited in scalability due to relatively complex and time-consuming processes. To challenge this issue, we suggest a simple yet robust strategy for realizing a high precision temperature controlled rigiflex mold directly amenable to printing process with high resolution and site-specific accuracy. The surface temperature of the mold controlled by localized joule-heating could be uniformly tuned over a large surface area. This work can offer a highly precise spatial controllability for patterning on specific regions, and it also shows a great potential for large area pattering and hierarchical structuring readily using step-and-repeat processes. |
