| 학회 |
한국재료학회 |
| 학술대회 |
2021년 봄 (05/12 ~ 05/14, 광주 김대중컨벤션센터) |
| 권호 |
27권 1호 |
| 발표분야 |
G. 나노/박막 재료 분과 |
| 제목 |
Direct In-situ Synthesis of TMD/CeO2 Multi-Heterostructures by Sequential Pulsed Laser Deposition |
| 초록 |
Transition metal dichalcogenides (TMDs) have a high degree of freedom to form interfaces with various materials owing to weak out-of-plane van der Waals interaction. Furthermore, their dangling-free-interfaces lead to a low density of interface trap and reduced scattering. Notably, multi-heterostructures (MHs) of atomically thin TMDs layers combined with metal oxide have gained significant attention to investigate their emergent phenomena in charge transport and optical properties. In spite of this advantage of MHs-TMDs combined with metal oxides, the fabrication of MHs-TMDs has been significantly challenging using conventional methods thus far. Compared to other conventional deposition methods, sequential pulsed laser deposition (PLD) has the advantage of being able to continuously stack various types of materials at low temperatures. Herein, we fabricated centimeter-scale in-situ MHs TMDs such as MoS2/WSe2, MoS2/CeO2, and MoS2/WSe2/CeO2 on Si/SiO2 substrates via PLD with multi-target carousels system. We performed X-ray photoelectron spectroscopy (XPS) and Raman spectrum analysis to observe the structural properties of TMDs heterostructures. Additionally, the sharp interface of each layer in heterostructures was verified via transmission electron microscopy (TEM) and energy dispersive spectroscopy (EDS) mapping. We believe that our research will be a cornerstone not only for the fabrication and characterization of various TMDs heterostructures but also for the realization of functional devices based on them. |
| 저자 |
Inhyeok Oh, Sehun Seo, Jun-Cheol Park, Sanghan Lee
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| 소속 |
Gwangju Institute of Science and Technology (GIST) |
| 키워드 |
transition metal dichalcogenides; molybdenum sulfides; tungsten selenides; cerium oxide; pulsed laser deposition; heterostructure
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| E-Mail |
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