| 학회 | 한국재료학회 |
| 학술대회 | 2020년 가을 (11/18 ~ 11/20, 휘닉스 제주 섭지코지) |
| 권호 | 26권 1호 |
| 발표분야 | G. 나노/박막 재료 분과 |
| 제목 | Electrical and optical properties of transition metal doped tin oxide thin films grown by spray pyrolysis deposition |
| 초록 | Usage of transparent conducting oxides (TCOs) such as fluorine doped tin oxide (SnO2), indium tin oxide (ITO) and, zinc oxide is rapidly increasing along with industrial development. These TCOs have applied to many semiconductor devices such as smart window, light emitting diodes. Recently, many researches have tried to increase higher carrier concentration or mobility in TCOs for enhancing electrical performance. However, there are problems that carrier concentration and mobility are incompatible. To solve these problems, many researches tried to obtain high carrier concentration and mobility through incorporating impurities, controlling structures and so on. The fundamental principle of these methods is controlling the ratio constant between the carrier concentration and mobility via controlling effective mass. Effective mass can be changed by controlling shape of bonding, crystal structure, permeability, and permittivity. However, there were insufficient researches about controlling effective mass via magnetic property. Herein, we tried to modulate the electrical and optical properties of the tin oxide thin films by incorporating or doping various transition metal elements. Transition metal doped tin oxide was grown through the high productivity spray pyrolysis deposition method by adding magnetic elements. The optical properties were measured by UV-visible spectroscopy. The electrical properties were measured via Hall effect measurement. The structural analysis was measured by X-ray diffraction, Scanning electron microscope and Atomic force microscope. Base on the structural analysis, it was confirmed that the transition metal elements were successfully doped into the tin oxide matrix. The electrical and optical properties of the tin oxide were systematically modulated with variation of the doped transition metal element contents. Acknowledgement This research was supported by Basic Science Research Program through the National Research Foundation of Korea (NRF) funded by the Ministry of Science and ICT (NRF-2018R1A2B6006968). |
| 저자 | Si-Hyeon Lee1, Sang-Seok Lee2, Il-Kyu Park1 |
| 소속 | 1Department of Materials Science and Engineering, 2Seoul National Univ. of Science and Technology |
| 키워드 | Transparent conducting oxides; Carrier concentration; Mobility; effective mass; magnetic elements |
