| 학회 |
한국재료학회 |
| 학술대회 |
2018년 가을 (11/07 ~ 11/09, 여수 디오션리조트) |
| 권호 |
24권 2호 |
| 발표분야 |
D. 구조 재료 분과 |
| 제목 |
Optimize Coating Conditions and Microstructure Observation on Ti and/or Ti-Based Alloys by Molybdenum Cemical Vapor Deposition |
| 초록 |
In this study, Mo (Molybdenum) chemical Vapor deposition (CVD) on Ti-based alloys was researched. The Mo CVD formed a Mo coating layer with a precursor of Mo(CO)6 (molybenum hexacarbonyl). The Mo layer was manufactured through chemical formula of Mo(CO)6 → Mo + 3CO2. Various coating condition such as a reaction temperature (250-450 °C), a deposition temperature (450-600 °C) and a precursor amount (5-10 g) were investigated following vacuum atmosphere. The optimal coating conditions for stable formation of Mo layer were suggested by comparing these conditions. At the same time, the Mo coating layers by CVD were discussed term of microstructure and phased by SEM, BSE, EDS and XRD. |
| 저자 |
JiHyeon Jeong1, Kwangsu Choi2, Joon Sik Park3
|
| 소속 |
1Department of Materials Science and Engineering, 2Hanbat National Univ., 3Daejeon 34158 |
| 키워드 |
CVD; Mo CVD; Mo Coating
|
| E-Mail |
|
