화학공학소재연구정보센터
학회 한국공업화학회
학술대회 2005년 가을 (10/28 ~ 10/29, 건국대학교)
권호 9권 2호
발표분야 전기화학
제목 황산구리 수용액에서의 유속에 따른 구리 석출 형태 연구
초록 Copper plating has been industrially applied in many parts for a long time. In recent because of high density of electronic component and subminiaturization more improved plating method became to be needed. In this experiment, We set purpose to improve plating method by change the flow rate, checking the shape of plated copper and decreasing the thickness deviation. And we could decrease the thickness deviation by making self-plating device and then using this device which uses Eductor nozzles that can change flow rate.
저자 김덕현
소속 한국산업기술대
키워드 ; 동도금; Eductor
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