화학공학소재연구정보센터
학회 한국고분자학회
학술대회 2014년 가을 (10/06 ~ 10/08, 제주 ICC)
권호 39권 2호
발표분야 고분자가공/복합재료-자가치유 고분자와 복합소재
제목 Dry-etched Graphite Grid with Reusable Stencil Mask
초록 Transparent, flexible and stretchable electrode is an essential part to soft electronics. Not only the materials but also the structures of the electrode are developed to achieve high flexibility with low sheet resistance and high optical transmittance. In previous researches, random network or ordered grid pattern was introduced to offer transmittance and flexibility to metal structure. Graphite grid was also fabricated with CVD on nickel mesh catalyst. In this study, we introduce stencil lithography to fabricate graphite grid. For this work, graphite was synthesized on nickel by CVD technique, transferred to flexible substrate and exposed to oxygen plasma under metal mesh mask. The change of transmittance and sheet resistance with the variation of etching time was observed. We searched the optimal etching time and the optimal case of graphite grid was characterized.
저자 박성준, 김대우, 장성우, 정희태
소속 KAIST
키워드 Transparent electrode; Flexible; Graphite; Grid; Stencil
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