| 초록 |
Polymeric microsystems, nowadays, attract attention in microelectromechanical system (MEMS) and lab-on-a-chip device. For actuator system, many studies try to achieve diverse and precise motion since, as improve the motion of microactuator, the actuator system cannot apply only for micro-robot, but also microfluidic control system. Previous case, most experiments have done with permanent magnet or electromagnet, which contains iron core with electrical solenoid, Here, for the first time, I introduce polymeric actuator system, consist of polydimethylsiloxane (PDMS) and cobalt iron oxide (CoFe2O4), which can react by electromagnetic field from only electrode. PDMS microarray which contains cobalt iron oxide, is manufactured by photolithography and, after setting an electrode under polymer patch, the motion of the actuator system can be systematically controlled by current. In this case, I utilize PDMS with small young’s modulus. |
