| 초록 |
Multi-wall carbon nanotubes(MWCNTs) were synthesized by Helicon Plasma-Enhanced Chemical Vapor Decomposition(helicon-PECVD), and metal nano-particle coating on the surface of cabon nanotubes was performed with helicon-PECVD. We used CO as a carrier gas and ferrocene as catalyst, and then we successfully obtained the MWCNTs , diameter of 10nm. The structural and morphological properties of MWCNTs were investigated by SEM, HR-TEM, Raman spectroscopy. Also, using H₂plasma treatment with ferroncene, we coated metal nano particles on purified CNTs(metal –CNTs). Metal-CNTs were confirmed using SEM and Raman spectroscopy. |
