| 초록 |
We have combined negative tone photoresist chemistry with the chemistry of neutral surfaces to create patterned BCP morphologies with controlled microdomain orientation. The advantages of our approach are the accessibility to (a) substrate-independent neutral surfaces for BCPs containing temperature sensitive monomers, and (b) photo-patterned substrates (silicon, gold, glass, etc) with regions of different interfacial energies resulting in patterned BCP morphologies. The photo-patterning of BCP orientation can be potentially integrated with the existing lithography process to create device oriented structures. |
