| 초록 |
Ultralow-k materials (k ＜ 2.2) with small and uniform pores need to be developed for the next generation semiconductors. One of the hot issues is to inhibit the microphase separation of the pore-generating organics (porogen) in the inorganic matrices during sol-gel reaction. We used triacetyl-b-cyclodextrin (TABCD) (1.5 ~ 2 nm in diameter) and methyl silsesquioxane (MSSQ) as a porogen and matrix, respectively. And we applied differential TGA qualitatively to predict the domain sizes of the organic phases in the matrix. Star-shaped poly(caprolactone) (PCL) was used as a reference porogen. Conductivity measurement for the nanohybrids indicated that TABCD showed no interconnected pores up to 40 vol% but PCL started to be interconnected at 20 vol%. Refractive indices of the porous thin films prepared by TABCD decreased linearly with the increasing amount of the porogen and dielectric constant reached down to 1.7 at the porosity of 40 vol%. |
