| 학회 |
한국화학공학회 |
| 학술대회 |
1997년 가을 (10/24 ~ 10/25, 충남대학교) |
| 권호 |
3권 2호, p.3409 |
| 발표분야 |
재료 |
| 제목 |
PMDA-ODA 폴리이미드의 Precursors에 따른 Water Sorption 거동 연구 |
| 초록 |
Aromatic polyimides are widely used in the fabrification of microelectronic devices, such as semiconductor chips and multi-chip modules as dielectric materials owing to the excellent electrical properties, high thermal stability, excellent mechanical properties, and high chemical resistance. Despite their inherent attractiveness, polyimides are known to absorb water in some amounts. The water absorbed sometimes causes reliability problems interfaces for microelectronic devices. In addition, the water absorbed increases the dielectric constant, resulting in a minimum electrical performance in the devices. To understand and classify the effect of precursor type on water diffusion characteristics and morphology of polyimide thin films, PMDA-ODA polyimide thin films of the two different precursor type were prepared. Chatacteristics of water sorption kinetics were measured by the gravimetric technique. By using x-ray diffraction technique, the effect of precursor on the morphology in polyimide thin films was investigated.
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| 저자 |
김승진, 서종철, 임창호, 정현수, 조영일, 한학수
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| 소속 |
연세대 |
| 키워드 |
Precursor; Water Sorption; morphology
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| E-Mail |
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| 원문파일 |
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