| 학회 |
한국재료학회 |
| 학술대회 |
2007년 가을 (11/02 ~ 11/02, 성균관대학교) |
| 권호 |
13권 2호 |
| 발표분야 |
전자재료 |
| 제목 |
Sol-Gel 법에 의해 도핑된 ZnO 투명 전도 박막의 제작과 특성 |
| 초록 |
Doped ZnO thin films were fabricated via a sol-gel technique and electrical and optical properties of the films were investigated. Film deposition was performed by spin coating at 3000 rpm for 30 second on SiO2 glass substrate. FE-SEM was used to obtain the surface morphology images and the film thickness. Four-point probe and UV-VIS spectrophotometer were used to measure the sheet resistance and the optical transparency, respectively. |
| 저자 |
남길모, 권명석
|
| 소속 |
서울시립대 |
| 키워드 |
Sol-Gel법; ZnO; doping; transparent conducting oxide
|
| E-Mail |
|
